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Tencor surfscan 7200 Listing ID: 291

Number of Times Viewed: 924

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Patterned / Unpatterned wafers: Patterned 

Repeatability: Less than 3% (mean count of 500 particles, 0.5um diameter latex spheres) 

Resolutio:n 0.4um diameter latex spheres 

Substrate: Thickness SEMI standard wafer thickness from 0.3 - 0.75mm 

Substrate size: 100, 125, 150 and 200mm

Thruput: 22 wafers per hour (150mm), 19 wafers per hour (200mm)